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Components include intelligent machines for real-time online measurement of advanced sensors, precision machine tool control software and comprehensive product design, production, sales, use of all elements of information technology. NIST Manufacturing Engineering Institute for industrial groups to provide technical assistance off, developed measurement standards, measurement techniques, hardware, software and data interfaces. Create problems in various fields of specialized national institutions - the Institute also subject to automatic processing of the leadership of the Institute of Manufacturing Engineering, the Institute researchers also engaged in the processing of nano-scale research work for future development of the atomic-level production technology 4 the amount of barium tool. The following measures were introduced on the Institute's work. 1. Atomic-level measuring machine to 2001, integrated circuits and optical instruments on the surface roughness, line width, line depth measurement needs such as the size of 0. inm ~ 1nm uncertainty. Moreover, from a few square millimeters to a square meter range are required to have such uncertainty. In order to meet these needs refinement, NIST is developing the Molecular Measuring Machine (m). na. To 25cm in the regions in atomic-scale precision positioning and measurement. It will insert a specialized scanning tunneling microscope system, the system consists of a core structure is very hard slide mobile probe, measuring probe and the location of the interference device samples isolated from vibration and acoustic disturbances and the two devices. nl. Once completed, will be characterized as a high-order silicon atoms arranged on the surface displacement, geometry and deformation methods. m. 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