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| Femtosecond laser micro-fine processing technology and MEMS dynamic testing techniques
be, LilacMuller, RichardS. Mullereta1. FullThree. dimensionalMotionCharacterizationofaGimballedElectrostaticMicroactuator, 39thAnnualReliabilityPhysicsSymposium, Orlando, Florida ,2001:91-98. 【21】 ChristianRembe, HaraldAschemann, StefanAusderWiescheetal, NontactileReliabilityTestingofaMicroOpticalAttenuator. 38thAnnumInternationalRelia-bilityPhysicsSymposium, SanJoseCalifornia, 2000. 【22】 DavisCQ, FreemanDM. UsingaLishtMicroscopetoMeasureMotionswithNanometerAccuracy, OpticalEngineering ,1998,37:1299-1304. 【23】 D. M. Freeman, A. J. Aranyosi, M. J. Gordonet Ⅱ Z. MultidimensionalMotionAnalysisofMEMSUsingComputerMicrovision, HiltonHead, SC, Dig. SolidStateSensor & ActuatorWorkshop. 1998:150-155. 【24】 W. Hemmert, M. S. Mermelstein, D. M. Freeman, NanometerResolutionofThree. dimensionalMotionsUsingVideoInterferenceMicroscopy,ugg milano, IEEEIntema ・ tionalMEMS99. OdandoFL, USA, February199I9. 【25】 C. Quentin. Davis, ZoherZ. Karu. andD. M. Freeman, EquivalenceofSubpixelMotionEstimatorsBasedonOpticalFlowandBlockMatching, Intema-tionalSymposiumonComputerVision, CoralGables, FIorida. November21-23. 1995. 【26】 DanielJ. BumsandHerbertF. Helbig. AsystemforAutomaticElectricalandOpticalCharacterizationofMicroelectromechanicalDevices [J】. Microelec. tromecK Organisation ?. , 1999,8 (4) :473-482. 【27】 Jincui Yun, Li Tai Chao, Feng Yalin, etc., based on the synthesis of micro-structure of fuzzy image plane motion measurement technology, micro-nano electronics ,2003.7-8 :208-211. 【28】 Hu Chunguang, Jincui Yun, Hu Xiaodong, etc.,ugg stivali, MEMS dynamic testing system in the strobe driving circuit to achieve INSTRUMENT,stivali ugg, 2003,ed hardy clothing,24 (z4) :380-382. 【29】 Guo Tong, Xiao-Dong Hu, fruit large extra fine, microscopic interferometry techniques in the MEMS dynamic testing system, micro-nano electronics. 2003,40 (  :218-220. 【30】 Duzhen Hui, Jiang Chengzhi, Tao Zhi-fei,air jordans, Xie Yan, Zhong Ying, Guoxiong, laser Doppler effect in MEMS motion measurement study, in 2003 the Chinese Society of Mechanical Engineering, Shenzhen. 2003. About Hu Xiao Tang (1952 a), male, professor, Ph.D. advisor. Research interests include testing and processing of micro-nano technology. 57
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